Method and apparatus for determining surface properties

Details Method and apparatus for determining surface properties Method and apparatus for determining surface properties

2006-05-30

2008-12-23

Pham, Hoa Q (Department: 2886)

Optics: measuring and testing

Dimension

Thickness

C356S425000, C356S634000

Reexamination Certificate

active

07468800

ABSTRACT:
A method of determining surface properties is provided, in which radiation is irradiated onto a first region of a surface to be examined, then at least some of the radiation irradiated onto the first region and returned by the latter is detected, and a measured value characteristic of this returned radiation is output. In a further step, the radiation is irradiated onto a second region of the surface and once again at least some of the radiation irradiated onto the second region and returned by the latter is detected, and a second measured value characteristic of this radiation is output. Finally, a result value is output which is characteristic of a relationship between the first measured value and the second measured value.

REFERENCES:
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patent: 6313913 (2001-11-01), Nakagawa et al.
patent: 2002/0093648 (2002-07-01), Nikoonahad et al.
patent: 2006/0033922 (2006-02-01), Sperling et al.
patent: 2006/0065857 (2006-03-01), Lex
patent: 2006/0092417 (2006-05-01), Schwarz et al.
patent: 2006/0119854 (2006-06-01), Sperling et al.

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