Method and apparatus for determining surface layer thickness...

Details Method and apparatus for determining surface layer thickness... Method and apparatus for determining surface layer thickness...

2007-09-18

2007-09-18

Lauchman, Layla G. (Department: 2877)

Optics: measuring and testing

Dimension

Thickness

Reexamination Certificate

active

10754679

ABSTRACT:
An inspection tool includes an illumination element for directing light beams onto a workpiece at differing wavelengths or at differing angles of incidence or combinations thereof. Such beams producing reflected light and scattered light optical signals. A scanning element and optical detector elements are provided. The optical detector elements receive reflected light signals and scattered light signals. Circuitry for receiving the reflected light signals and scattered light signals are used to determine thickness values for partially transmissive layers formed on the workpiece and correct for the effects of the thickness of the partially transmissive layer so that said signals can be used to identify and characterize defects of the workpiece. Moreover, the invention includes descriptions of methods for accomplishing such inspections.

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