Measuring and testing – Surface and cutting edge testing – Roughness
Reexamination Certificate
2008-05-25
2008-10-28
Cygan, Michael (Department: 2855)
Measuring and testing
Surface and cutting edge testing
Roughness
C073S606000
Reexamination Certificate
active
07441446
ABSTRACT:
By digitizing the UFM signal without using a lock-in amplifier, substantially all of the information initially contained in the UFM output signal may be maintained and may then be used for further data processing. Consequently, any type of model or evaluation algorithm may be used without being restricted to a very narrow bandwidth, as is the case in lock-in based techniques. The digitizing is performed on a real-time basis, wherein a complete UFM curve is digitized and stored for each scan position. In this way, quantitative meaningful values for specific surface-related characteristics with a nanometer resolution may be obtained.
REFERENCES:
patent: 4603585 (1986-08-01), Atalar
patent: 5329808 (1994-07-01), Elings et al.
patent: 5402681 (1995-04-01), Nakaso et al.
patent: 6305226 (2001-10-01), Barber et al.
patent: 6694817 (2004-02-01), Degertekin et al.
patent: 6838889 (2005-01-01), Su et al.
patent: 7129486 (2006-10-01), Spizig et al.
patent: 2004/0084618 (2004-05-01), Spizig et al.
patent: 2004/0206166 (2004-10-01), Proksch et al.
Inagaki, K. et al. Waveguide ultrasonic force microscopy at 60 MHz, Appl. Phys. Lett., vol. 76, No. 14, Apr. 2000, pp. 1836-1838.
Rabe, U. Nanomechanical surface characterization by atomic force acoustic microscopy, J. Vac. Sci. Technol. B, vol. 15, No. 4, Aug. 1997, pp. 1506-1511.
R. Hillenbrand, et al., “Higher-harmonics generation in tapping-mode atomic-force microscopy: Insights into the tip-sample interaction” American Institute of Physics 2000.
A. Rosa-Zeiser, et al. “The simultaneous measurement of elastic, electrostatic and adhesive properties by scanning force microscopy: pulsed-force mode operation” Meas. Sci. Technol. 8 (1997).
Chumakov Dmytro
Geisler Holm
Zschech Ehrenfried
Advanced Micro Devices , Inc.
Cygan Michael
Williams Morgan & Amerson P.C.
LandOfFree
Method and apparatus for determining surface characteristics... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Method and apparatus for determining surface characteristics..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method and apparatus for determining surface characteristics... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3996332