Method and apparatus for determining object dimension and other

Details Method and apparatus for determining object dimension and other Method and apparatus for determining object dimension and other

1974-09-13

1977-03-01

Corbin, John K.

Optics: measuring and testing

Refraction testing

Prism engaging specimen

356111, G01B 902

Patent

active

040099652

ABSTRACT:
The disclosed invention relates to methods and apparatus for obtaining the dimension, position or angle of an object using a point on the object boundary surface to create a diffraction wave when illuminated by a laser beam or other source of electro-magnetic radiation. This diffraction wave is then analyzed to obtain information as to the position of the object point tangent to the laser beam or the angular orientation of the object boundary at said object point.

REFERENCES:
patent: 3783296 (1974-01-01), Blevins
Lee et al.; "Fresnel Diffraction Patterns of an Away of Circular Apertures;" JOSA vol. 57 p. 1115 9/67.
Watkins, L. S., "Inspection of Integrated Circuit Photomasks with Intensity Spatial Filters," Proc. IEEE, 9/69, p. 1634.

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