Method and apparatus for determining mis-registration

Details Method and apparatus for determining mis-registration Method and apparatus for determining mis-registration

1994-10-11

1997-01-07

Couso, Jose L.

Image analysis

Image transformation or preprocessing

Changing the image coordinates

382218, 382151, G06K 932, G06K 968

Patent

active

055925731

ABSTRACT:
An image processing apparatus includes a data acquisition stage for acquiring data representative of several spatially separated regions of a sample. The apparatus also includes data storage means for storing reference data corresponding to the sample data. The two sets of data are compiled and analyzed to determine if the sample is shifted from a nominal position.

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Patent Abstracts of Japan; vol. 7, No. 113 (M-221) 10 Jun. 1983 & JP-A-58 049 262 (Dainippon Insatsu KK) 23 Mar. 1983.
European Search Report No. EP 93 81 0534; Communication No. 93810534.3-dated Nov. 5, 1993.

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