Semiconductor device manufacturing: process – With measuring or testing
Reexamination Certificate
2005-04-26
2005-04-26
Tran, Michael (Department: 2818)
Semiconductor device manufacturing: process
With measuring or testing
C438S012000, C438S016000, C438S017000, C438S018000
Reexamination Certificate
active
06884640
ABSTRACT:
One embodiment of the present invention provides a system that determines the composition of a layer within an integrated device. The system operates by first receiving the integrated device. Next, the system measures properties of the layer using electromagnetic radiation. The properties of the layer measured are used to determine an index of refraction for the layer. The system then solves for the composition of the layer using the index of refraction.
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Bjeletich Peter J.
Hunt Charles E.
Peterson Jeffrey J.
Berry Renee R.
Park Vaughan & Fleming LLP
The Regents of the University of California
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