Coating processes – Measuring – testing – or indicating – Thickness or uniformity of thickness determined
Patent
1996-09-19
2000-02-15
Bareford, Katherine A.
Coating processes
Measuring, testing, or indicating
Thickness or uniformity of thickness determined
427240, 118712, 118 52, 118667, B05D 312, B05C 1102
Patent
active
060250127
ABSTRACT:
The present invention provides an apparatus which is capable of discharging a process liquid to a rotating substrate at a very constant rate irrespective of variations in the state of the process liquid. A process liquid is discharged toward a rotating substrate by nozzles which are moved from inner to outer radius sides of the rotating substrate. The present invention further provides a method in which film thickness control conditions are determined based on a simulation of a behavior of a process liquid on a substrate.
REFERENCES:
patent: 5127362 (1992-07-01), Iwatsu et al.
patent: 5250116 (1993-10-01), Tanimoto
Hirota Osamu
Kamihara Motoaki
Kanashima Keinosuke
Matsuda Naoko
Naka Hiroyuki
Bareford Katherine A.
Matsushita Electric - Industrial Co., Ltd.
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