Optics: measuring and testing – By light interference – For dimensional measurement
Reexamination Certificate
2005-06-07
2005-06-07
Turner, Samuel A. (Department: 2877)
Optics: measuring and testing
By light interference
For dimensional measurement
Reexamination Certificate
active
06903826
ABSTRACT:
Standard patterns of differential values of interference light that correspond to a predetermined step height of the first material being processed and standard patterns of differential values of interference light that correspond to a predetermined remaining mask layer thickness of the material are set. These standard patterns use wavelengths as parameters. Then, the intensities of interference light of multiple wavelengths are measured for a second material that has the same structure as the first material. Actual patterns with wavelength as parameter are determined from differential values of the measured interference light intensities. Based on the standard patterns and the actual patterns of the differential values, the step height and the remaining mask layer thickness of the second material are determined.
REFERENCES:
patent: 4767495 (1988-08-01), Nishioka
patent: 5552016 (1996-09-01), Ghanayem
patent: 5648849 (1997-07-01), Canteloup et al.
patent: 5658418 (1997-08-01), Coronel et al.
patent: 5835226 (1998-11-01), Berman et al.
patent: 5928532 (1999-07-01), Koshimizu et al.
patent: 6081334 (2000-06-01), Grimbergen et al.
patent: 6801334 (2000-06-01), Grimbergen et al.
patent: 6207008 (2001-03-01), Kijima
patent: 6261470 (2001-07-01), Smith, Jr. et al.
patent: 6297064 (2001-10-01), Koshimizu
patent: 6306669 (2001-10-01), Yano et al.
patent: 6383402 (2002-05-01), Smith, Jr. et al.
patent: 6414499 (2002-07-01), Yano et al.
patent: 2001/0016053 (2001-08-01), Dickson et al.
patent: 2002/0009814 (2002-01-01), Usui et al.
patent: 2002/0029854 (2002-03-01), Schertler
patent: 2003/0085198 (2003-05-01), Yi et al.
patent: 1 089 146 (2001-04-01), None
patent: 61-53728 (1986-03-01), None
patent: 63-200533 (1988-08-01), None
patent: 63-244847 (1988-10-01), None
patent: 64-068932 (1989-03-01), None
patent: 05-179467 (1993-07-01), None
patent: 06-084849 (1994-03-01), None
patent: 8-274082 (1996-10-01), None
patent: 2000-097648 (2000-04-01), None
patent: 2000-106356 (2000-04-01), None
patent: 2000-228397 (2000-08-01), None
patent: 2000-324297 (2000-11-01), None
patent: 2002-512447 (2002-04-01), None
David L. Lide,CRC Handbook of Chemistry and Physics, CRC Press, R.W.B. Pearse and A.G. Gaydon, “The Identification of Molecular Spectra”, John Wiley & Sons, Inc., 1976.
Sasaki et al., “Estimation of Component Spectral Curves From Unknown Mixture Spectra”, App. Opt., vol. 23, pp. 1955-1959 (1984).
Fujii Takashi
Kaji Tetsunori
Usui Tatehito
Yamamoto Hideyuki
Yoshigai Motohiko
Antonelli Terry Stout & Kraus LLP
Lyons Michael A.
Turner Samuel A.
LandOfFree
Method and apparatus for determining endpoint of... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Method and apparatus for determining endpoint of..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method and apparatus for determining endpoint of... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3489457