Method and apparatus for determining chemistry of part's...

Details Method and apparatus for determining chemistry of part's... Method and apparatus for determining chemistry of part's...

2006-03-28

2006-03-28

Hoff, Marc S. (Department: 2857)

Data processing: measuring, calibrating, or testing

Measurement system

History logging or time stamping

C438S014000

Reexamination Certificate

active

07020583

ABSTRACT:
An electronic monitoring device that archives chemical exposures of a consumable part inside a semiconductor processing tool. The monitoring device includes a memory unit dedicated to the consumable part and which stores a history of the chemical exposures of the consumable part, a processor in communication with the memory unit, and a power supply circuit that supplies power to the processor and the memory unit.

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