Optics: measuring and testing – By shade or color – With color transmitting filter
Patent
1997-06-04
1999-11-23
Font, Frank G.
Optics: measuring and testing
By shade or color
With color transmitting filter
356432, 356445, G01N 2125
Patent
active
059910445
ABSTRACT:
A method and apparatus for measuring the characteristics of microstructures by modulating a sample using a modulated source and utilizing a microscope to magnify a desired sample area and direct a monochromatic probe light source onto the desired microstructure of the sample. The probe light is reflected by the sample and the reflectance spectra is directed by the microscope and thereafter, is detected and transmitted to a computer to record or display the measured characteristic. Further, the computer is also used to control the brightness of the monochromatic probe light and to control the modulation frequency of the modulated source. The wavelength of the monochromatic probe light can also be varied by the computer. The magnification of the microscope can be varied so that the desired microstructure is visible and the probing light spot is precisely placed on it. The desired sample microstructure can be precisely located within the viewing field of the microscope through the use of an indicator like a cross line indicator.
REFERENCES:
patent: 4720191 (1988-01-01), Siegel et al.
patent: 4991962 (1991-02-01), Jain
patent: 5159412 (1992-10-01), Willenborg et al.
patent: 5220403 (1993-06-01), Batchelder et al.
patent: 5270797 (1993-12-01), Pollak et al.
Fu Li Ming
Sheng George
Siping Zhoa
Yen Andrew
Zhang Yaohui
Font Frank G.
Institute of Microelectronics
Punnoose Roy M.
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