Method and apparatus for determining a location on a surface of

Details Method and apparatus for determining a location on a surface of Method and apparatus for determining a location on a surface of

1995-08-07

1997-10-28

Gonzalez, Frank

Optics: measuring and testing

By alignment in lateral direction

With registration indicia

356399, 356400, 250548, G01B 1100

Patent

active

056822421

ABSTRACT:
A method is proposed for determining a location on an object and for positioning an object, such as a silicon wafer, which has an array of generally perpendicular grid lines on its surface and a plurality of directional features. The method determines the directions of the grid lines relative to the direction of a reference coordinate system, detects a grid junction and detects a direction of one of the plurality of directional features, thereby providing a location of the grid junction in the reference coordinate system. The object is positioned in accordance with the provided location of the grid junction.

REFERENCES:
patent: 4780615 (1988-10-01), Suzuki
patent: 4823012 (1989-04-01), Kosugi
patent: 4918320 (1990-04-01), Hamasaki
patent: 4969116 (1990-11-01), Wada et al.
patent: 5037771 (1991-08-01), Lipp
patent: 5238354 (1993-08-01), Volovich
patent: 5241266 (1993-08-01), Ahmad et al.

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