Method and apparatus for determination of the depth of...

Details Method and apparatus for determination of the depth of... Method and apparatus for determination of the depth of...

2006-12-26

2006-12-26

Cygan, Michael (Department: 2855)

Measuring and testing

Surface and cutting edge testing

Roughness

C073S104000, C073S866000

Reexamination Certificate

active

07152461

ABSTRACT:
The invention relates to a method for determination of the depth of depressions which are formed in a mount substrate. According to the invention, an essentially uniform layer of a wetting agent is applied, which contains depressions, on a surface of the mount substrate, a time profile of the decrease in weight of the mount substrate is recorded, and the recorded time profile of the decrease in weight of the mount substrate is evaluated. The invention also relates to a measurement apparatus.

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patent: 6708559 (2004-03-01), Chen et al.
patent: 7020577 (2006-03-01), Wilby
patent: 2003/0061890 (2003-04-01), Chen et al.
patent: WO-02/03449 (2002-01-01), None

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