Method and apparatus for detecting the temperature of a sample

Details Method and apparatus for detecting the temperature of a sample Method and apparatus for detecting the temperature of a sample

1994-05-19

1996-09-17

Gutierrez, Diego F. F.

Thermal measuring and testing

Temperature measurement

Nonelectrical, nonmagnetic, or nonmechanical temperature...

2504581, 2504591, 250234, 2505781, G01K 1132, G01K 1120

Patent

active

055562043

ABSTRACT:
This invention relates to a vacuum processing method and apparatus. When a sample is plasma processed under a reduced pressure, a sample bed is cooled by a cooling medium kept at a predetermined temperature lower than an etching temperature, the sample is held on the sample bed, a heat transfer gas is supplied between the back of the sample and the sample installation surface of the sample bed, and the pressure of the heat transfer gas is controlled so as to bring the sample to a predetermined processing temperature. In this way, a sample temperature can be regulated rapidly without increasing the scale of the apparatus. The temperature of the sample can be detected by a detector including a movable optical fiber having one end at which a phosphor is mounted and another end for transferring the fluorescence from the phosphor, a fixed optical transfer member provided apart from the another end of the movable optical fiber for receiving the fluorescence, a detector for detecting the temperature based on the fluorescence received by the fixed optical transfer member, and an actuating member for moving the movable optical fiber to provide thermal contact between the sample and the phosphor.

REFERENCES:
patent: 3751305 (1973-08-01), Huebscher
patent: 4408827 (1983-10-01), Guthrie et al.
patent: 4770544 (1988-09-01), Mossey
patent: 4776827 (1988-10-01), Greaves
patent: 4845647 (1989-07-01), Dils et al.
patent: 4997286 (1991-03-01), Fehrenbach et al.
patent: 5304795 (1994-04-01), Fujihira et al.
patent: 5352040 (1994-10-01), Mihalczo et al.

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