Method and apparatus for detecting the focusing position in a la

Details Method and apparatus for detecting the focusing position in a la Method and apparatus for detecting the focusing position in a la

1981-09-01

1984-09-18

Punter, William H.

Optics: measuring and testing

By polarized light examination

With light attenuation

250201, 250237R, 356123, G01B 1114, H01J 314

Patent

active

044720556

ABSTRACT:
This invention relates to a method and device for detecting the focusing position in a laser processing apparatus, such as a machine for cutting plate-shaped workpieces by laser beams.
The method includes the steps of placing a light shielding member and a light sensor in a path of laser light beams irradiated through a condenser lens to the workpiece to be processed; moving at least either one of the light shielding member and light sensor along the optical axis of the laser beams; and detecting the position at which electrical output of the light sensor becomes either a minimum or a maximum; whereby the focusing position is determined.
The detector device comprises a condenser lens for converging laser beams which pass therethrough; a light shielding member installed along the optical axis of the laser beam between the condenser lens and the workpiece to be processed; a light sensor installed along the optical axis between the light shielding member and the workpiece to be processed; and a support for fitting the light shielding member and the light sensor thereto so that at least either one of the light shielding member and light sensor is installed in a freely movable manner on the support for adjustment purposes along the optical axis.

REFERENCES:
patent: 2524807 (1950-10-01), Kallmann
patent: 3689159 (1972-09-01), Taniguchi et al.
patent: 3997715 (1972-12-01), Elliott
patent: 4009392 (1977-02-01), Hanley
patent: 4322616 (1982-03-01), Fukuhara et al.
Frosch et al, "Optical Surface Microtopography Measurement for Automatic Focussing", IBM Tech. Disc. Bull. 7-1972, pp. 504-505.

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