Method and apparatus for detecting surface condition by utilizin

Details Method and apparatus for detecting surface condition by utilizin Method and apparatus for detecting surface condition by utilizin

1989-12-20

1991-10-29

Turner, Samuel

Optics: measuring and testing

By polarized light examination

With birefringent element

356349, 356358, 2502014, G01B 902

Patent

active

050610716

ABSTRACT:
Method and apparatus for detecting the roughness or undulation of a subject surface, by using a light beam which is converged on the subject surface by an object lens and which is reflected by the subject surface. A relative position between the object lens and the subject surface in the direction parallel to the optical axis of the lens is controlled so that the measuring light reflected by the subject surface has a plane wave. On the other hand, an amount of relative displacement between the object lens and the subject surface is detected, based on a heterodyne interference between a light beam reflected by a stationary mirror and a light beam reflected by a movable mirror which is moved as the relative position is changed. The surface condition is detected based on the amount of relative displacement between the object lens and the subject surface which is detected when said plane wave of said measuring light beam is obtained.

REFERENCES:
patent: 4848908 (1989-07-01), Huang

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