Chemistry: electrical and wave energy – Processes and products – Vacuum arc discharge coating
Patent
1983-09-02
1985-10-08
Metz, Andrew H.
Chemistry: electrical and wave energy
Processes and products
Vacuum arc discharge coating
204298, C23C 1500
Patent
active
045458820
ABSTRACT:
In the operation of sputtering targets, whether the targets are planar or cylindrical, magnetically enhanced or not, they are provided with a detectable material underlying the coating material carried on the target. As the target becomes depleted, the underlying material becomes deposited on the substrate and is then detected when appearing on the substrate. The detectable material can be a radioactive substance, an electrical characteristic detectable substance such as iron, an optically detectable substance such as copper or gold which is highly reflective, or a fluorescent substance. The target may have a thinner section of coating material immediately above the detectable material or the detectable material may be deeply imbedded in the target where the target is a solid substance and is water cooled from the opposed surface.
REFERENCES:
patent: 4166783 (1979-09-01), Turner
patent: 4311725 (1982-01-01), Holland
patent: 4341816 (1982-07-01), Lauterbach et al.
patent: 4374722 (1983-02-01), Zega
patent: 4407708 (1983-10-01), Landau
Innis David T.
Leader William T.
Metz Andrew H.
Shatterproof Glass Corporation
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