Optics: measuring and testing – By alignment in lateral direction – With registration indicia
Reexamination Certificate
2007-08-28
2007-08-28
Rosenberger, Richard A. (Department: 2877)
Optics: measuring and testing
By alignment in lateral direction
With registration indicia
Reexamination Certificate
active
11166106
ABSTRACT:
Disclosed is a method and apparatus for detecting a relative positional deviation between first and second objects. In one preferred form of the invention, the detecting method includes the steps of (i) providing the first and second objects with diffraction gratings, respectively, each having a grating pitch larger than a wavelength of a light source used, (ii) placing the first and second objects so that a dielectric material layer having a thickness smaller than the wavelength of the light source used is interposed between the first and second objects, and so that the diffraction gratings of the first and second objects are opposed to each other, (iii) projecting light from the light source onto the diffraction gratings of the first and second objects, and (iv) detecting the relative positional deviation between the first and second objects on the basis of diffraction light projected from the diffraction gratings to a space.
REFERENCES:
patent: 3768911 (1973-10-01), Erickson
patent: 4815850 (1989-03-01), Kanayama et al.
patent: 5162656 (1992-11-01), Matsugu et al.
patent: 5294980 (1994-03-01), Matsugu et al.
patent: 5325176 (1994-06-01), Suda et al.
patent: 5327221 (1994-07-01), Saitoh et al.
patent: 5508527 (1996-04-01), Kuroda et al.
patent: 5722905 (1998-03-01), Bidelman
patent: 6171730 (2001-01-01), Kuroda et al.
patent: 6334960 (2002-01-01), Willson et al.
patent: 6628392 (2003-09-01), Kuroda et al.
patent: 7001696 (2006-02-01), Inao et al.
patent: 2002/0071106 (2002-06-01), Yano et al.
patent: 2004/0080732 (2004-04-01), Kuroda et al.
patent: 2005/0064303 (2005-03-01), Yamada et al.
patent: 2006/0003233 (2006-01-01), Yamaguchi et al.
Flanders, D.C., et al. “A new interferometric alignment technique,” presented inApplied Physics Letters,vol. 31, No. 7, Oct. 1, 1997. pp. 426-428.
Inao Yasuhisa
Kuroda Ryo
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