Optics: measuring and testing – By particle light scattering – With photocell detection
Patent
1988-06-06
1990-03-20
McGraw, Vincent P.
Optics: measuring and testing
By particle light scattering
With photocell detection
356358, G01B 902
Patent
active
049105612
ABSTRACT:
An optical non-contact detection of profile errors of a surface or surfaces of an article, such as an industrial product is carried out by a coherent signal bea of light introduced along an imaginary plane and projected onto the surface of the article at a large angle of incidence. The signal beam of light is reflected from the surface toward the same imaginary plane and traveled past optical system toward a photosensitive material on which a separate reference beam of light is projected. A hologram of the surface is formed on the photosensitive material, which is used for an analysis of the profile errors of the surface.
REFERENCES:
patent: 3735036 (1973-05-01), Macovski
patent: 3837726 (1974-09-01), Suzuki et al.
patent: 4197010 (1980-04-01), Meyrueis et al.
patent: 4624568 (1986-11-01), Bartolomeo
patent: 4657396 (1987-04-01), Honda et al.
Honda Toshio
Suzuki Mitsuo
Tsujiuchi Junpei
Wakimoto Zenji
McGraw Vincent P.
Osaka Seimitsu Kikai Co., Ltd.
Turner S. A.
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