Method and apparatus for detecting positions of electrode pads

Details Method and apparatus for detecting positions of electrode pads Method and apparatus for detecting positions of electrode pads

2011-08-02

2011-08-02

Stafira, Michael P (Department: 2886)

Image analysis

Applications

Manufacturing or product inspection

Reexamination Certificate

active

07991219

ABSTRACT:
A method for detecting positions of a plurality of electrode pads of semiconductor chips formed on a semiconductor wafer includes: setting an imaging target region greater than a semiconductor chip on the semiconductor wafer; performing split imaging so as to entirely cover the imaging target region; and detecting positions of electrode pads of the semiconductor chip by processing images obtained by the split imaging. The split imaging is performed by using an imaging device which enlarges and images a region smaller than the imaging target region by one imaging.

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patent: 2005-45194 (2005-02-01), None
patent: 10-2005-0055041 (2005-06-01), None

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