Communications: electrical – Digital comparator systems
Patent
1978-11-28
1980-07-15
Boudreau, Leo H.
Communications: electrical
Digital comparator systems
250201, 250561, 364490, G06K 904
Patent
active
042131170
ABSTRACT:
A method and apparatus for detecting positions of chips on a semiconductor wafer. The method comprises an illuminating step for illuminating obliquely the semiconductor wafer from above including at least a position detecting direction; a totalizing step for optically totalizing, when the irregular reflecting rays reflecting at the semiconductor wafer illuminated at the illuminating step are photographed by an image pickup element or device, the irregular reflecting rays in the direction normal to the position detecting direction or for electrically totalizing the levels of a video signal produced by the image pickup element or device in the same direction; a video signal detecting step for producing a video signal with coordinates lying in the position detecting direction by photographing an image resulting from optical totalization at the totalizing step by the image pickup element or device or electrically totalizing the image; and a street position detecting step for detecting a street position between chips by extracting a specific coordinate with a wide width and a low level corresponding to dark from the video signal produced at the video signal detecting step. The apparatus executes the above-mentioned method.
REFERENCES:
patent: 3575588 (1971-04-01), Hermann
patent: 3693154 (1972-09-01), Kubo et al.
patent: 3796497 (1974-03-01), Mathisen et al.
patent: 3898617 (1975-08-01), Kashioka et al.
patent: 3955072 (1976-05-01), Johannsmeier et al.
patent: 4091394 (1978-05-01), Kashioka et al.
patent: 4115762 (1978-09-01), Akiyama et al.
Bojman, "Electro-optical Alignment of Substrates", IBM Tech. Disclosure Bulletin, vol. 13, No. 9, Feb., 1971, pp. 2687-2688.
Davis et al., "Automatic Registration in an Electron-beam Lithographic System", Solid State Technology, Aug., 1978, pp. 61-67.
Kembo Yukio
Kuni Asahiro
Makihira Hiroshi
Boudreau Leo H.
Hitachi , Ltd.
LandOfFree
Method and apparatus for detecting positions of chips on a semic does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Method and apparatus for detecting positions of chips on a semic, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method and apparatus for detecting positions of chips on a semic will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-466345