Method and apparatus for detecting pin-holes in a passivation la

Details Method and apparatus for detecting pin-holes in a passivation la Method and apparatus for detecting pin-holes in a passivation la

1997-09-24

1999-10-05

Brown, Glenn W.

Electricity: measuring and testing

Fault detecting in electric circuits and of electric components

Of individual circuit component or element

324450, 324765, 324 711, G01N 2720, G01N 2728, G01R 3112

Patent

active

059630400

ABSTRACT:
The present invention discloses a novel method and apparatus for de-etching pin-holes in a passivation layer that is deposited over a metal conductor layer on the surface of a semiconductor wafer by utilizing a substantially clear, electrically conductive film as a top electrode immersed in an electrolyte for observing under an optical microscope bubbles generated from a pin-hole on the wafer surface which functions as a bottom electrode when a DC current is flowing through the top electrode, the electrolyte and the bottom electrode such that gases in the form of bubbles are generated at the pin-hole site where metal is exposed to the electrolyte.

REFERENCES:
patent: 4103228 (1978-07-01), Ham
patent: 5059913 (1991-10-01), Nigro et al.
patent: 5504017 (1996-04-01), Yue et al.

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