Measuring and testing – With fluid pressure – Leakage
Patent
1983-02-03
1984-12-11
Ciarlante, Anthony V.
Measuring and testing
With fluid pressure
Leakage
73 40, G01M 304
Patent
active
044870582
ABSTRACT:
Test gas passing through leaks is conducted through a conduit to the discharge end of a counterflow pump or turbo-molecular pump. The leak gases advance opposite to the pumping direction of the counterflow pump to its intake side, and is detected by a detector connected to its inlet. The heavier gases (air) interfering with the detection, for which the counterflow pump has a substantially higher compression ratio, however, are retained mostly by the detector. Heretofore, the partial pressure of the test gas in the detector or the signal given off by it were used as a measure for the test gas current passing through a leak, while according to the invention the speed of the counterflow pump is varied so long until the detector signal has a predetermined size. The invention includes a device for adjusting the speed of the counterflow pump so as to obtain a high detection accuracy at less cost than heretofore.
REFERENCES:
patent: 2504530 (1950-04-01), Jacobs
patent: 3342990 (1967-09-01), Barrington et al.
patent: 3416359 (1968-12-01), Durbin et al.
patent: 3520176 (1970-07-01), Becker
patent: 3616680 (1971-11-01), Schrader
patent: 3645127 (1972-02-01), Mongodin et al.
patent: 3690151 (1972-09-01), Briggs
patent: 3762212 (1973-10-01), Morley et al.
Balzers Aktiengesellschaft
Ciarlante Anthony V.
Williams Hezron
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