Method and apparatus for detecting foreign particle

Details Method and apparatus for detecting foreign particle Method and apparatus for detecting foreign particle

1989-01-18

1990-10-23

Hannaher, Constantine

Radiant energy

Invisible radiant energy responsive electric signalling

Ultraviolet light responsive means

2504581, 250228, 356237, G01N 2147, G01N 2117, G01N 2121

Patent

active

049654543

ABSTRACT:
The present invention resides in a method and apparatus for detecting a foreign particle, wherein an ultraviolet light beam is radiated in the form of a spot to a sample having a protective film formed on a circuit pattern or a wiring pattern; the spot and the sample are scanned relative to each other; the ultraviolet light is absorbed by the protective film; diffracted light produced from a foreign particle present on the protective film is condensed by an integrating sphere; the thus-condensed light is sensed by an optoelectro transducer to convert it into an electric signal; and the foreign particle present on the protective film formed on the circuit pattern or the wiring pattern is detected on the basis of the electric signal provided from the optoelectro transducer.

REFERENCES:
patent: 4601576 (1986-07-01), Galbraith
patent: 4602160 (1986-07-01), Mactaggart
patent: 4626101 (1986-12-01), Ogawa et al.
patent: 4661706 (1987-04-01), Messerschmidt et al.
patent: 4669875 (1987-06-01), Shiba et al.
patent: 4740708 (1988-04-01), Batchelder
patent: 4873430 (1989-10-01), Juliana et al.
patent: 4902131 (1990-02-01), Yamazaki et al.

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