Method and apparatus for detecting defects in apertured plates

Details Method and apparatus for detecting defects in apertured plates Method and apparatus for detecting defects in apertured plates

1981-12-24

1984-05-08

McGraw, Vincent P.

Optics: measuring and testing

Inspection of flaws or impurities

Having predetermined light transmission regions

356378, G01N 2188

Patent

active

044471521

ABSTRACT:
A method and apparatus for detecting defects in apertures plates such as masks. The plate is illuminated by a collimated light beam and defects or irregularities are signalled by a bright spot of light. A modified microfilm reader or the like can be used to magnify and project an image of that portion of the plate associated with the bright spot of light.

REFERENCES:
patent: 4099881 (1978-07-01), Vanden Broek et al.
patent: 4319840 (1982-03-01), Kondo et al.
Kutch, "Inspection Apparatus for Apertured Green Sheets," IBM Tech. Disc. Bulletin, vol. 20, No. 7, Dec. 1977, pp. 2678-2679.

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