Electricity: measuring and testing – Measuring – testing – or sensing electricity – per se – With rotor
Patent
1985-03-28
1988-05-17
Eisenzopf, Reinhard J.
Electricity: measuring and testing
Measuring, testing, or sensing electricity, per se
With rotor
324158R, 324158D, 250310, 250311, G01N 2300
Patent
active
047453621
ABSTRACT:
A method and apparatus for detecting and imaging a voltage signal of at least one specific frequency at a measuring location of a test object, such as an integrated circuit, employ a scanning particle or radiation microscope for generating a voltage contrast signal whereby primary particles or radiation are pulsed or otherwise intensity-modulated with at least one specific frequency which frequency is different from at least one frequency of the signal at the test location. The voltage contrast signal is mixed to a specific intermediate frequency and the resulting mixed signal is demodulated. The method and apparatus can be utilized to identify faulty electronic modules.
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"Une Alternative Economique Au Contraste De Potentiel Stroboscopique: Le Traitement Du Signal D'Electrons Secondaries D'un Microscope A Balayage," Collin, Journees D'Electronique 1983, pp. 283-298--Jul. 1983.
Eisenzopf Reinhard J.
Nguyen Vinh P.
Siemens Aktiengesellschaft
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