Electricity: measuring and testing – Measuring – testing – or sensing electricity – per se – With rotor
Patent
1988-02-04
1989-08-01
Eisenzopf, Reinhard J.
Electricity: measuring and testing
Measuring, testing, or sensing electricity, per se
With rotor
324158D, 250310, 250311, G01N 2300, G01R 3126
Patent
active
048536229
ABSTRACT:
A method and apparatus for detecting and imaging a voltage signal of at least one specific frequency at a measuring location of a test object, such as an integrated circuit, employ a scanning particle or radiation microscope for generating a voltage contrast signal whereby primary particles or radiation are pulsed or otherwise intensity-modulated with at least one specific frequency which frequency is different from at least one frequency of the signal at the test location. The voltage signal also includes an unmodulated topography component. The voltage contrast signal is mixed to a specific intermediate frequency and the resulting mixed signal is demodulated. The mixed signal is added to the unmodulated topography component and the result of the addition is displayed. The method and apparatus can be utilized to identify faulty electronic modules.
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Eisenzopf Reinhard J.
Nguyen Vinh P.
Siemens Aktiengesellschaft
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