Method and apparatus for detecting a substrate feature

Details Method and apparatus for detecting a substrate feature Method and apparatus for detecting a substrate feature

2005-05-10

2005-05-10

Toatley, Jr., Gregory J. (Department: 2877)

Optics: measuring and testing

Dimension

Thickness

C356S631000, C356S637000

Reexamination Certificate

active

06891629

ABSTRACT:
The invention is directed to a method and apparatus for detecting a substrate feature. A sensor is secured opposite the substrate. The sensor emits a signal onto the surface of the substrate. The sensor detects the amount of signal reflected from the substrate. The sensor is programmed with the relative signal reflective properties for a surface of the substrate. The sensor compares the expected signal reflection rates for a surface of the substrate to the actual signal reflection rate. The sensor generates an output signal to an output device.

REFERENCES:
patent: 4357899 (1982-11-01), Jones et al.
patent: 5745244 (1998-04-01), Svanqvist et al.

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