Method and apparatus for depositing superconducting layer onto t

Details Method and apparatus for depositing superconducting layer onto t Method and apparatus for depositing superconducting layer onto t

1995-09-12

2000-03-14

Kunemund, Robert

Superconductor technology: apparatus, material, process

Processes of producing or treating high temperature...

Coating

505475, 505476, 505731, 505732, 20429802, 20429812, 20429813, C30B 2308

Patent

active

06037313&

ABSTRACT:
The method for forming superconducting films of complex oxide compounds in a process chamber according to the present invention includes the steps of:
(a) placing a substrate near a target in a chamber so that the substrate is positioned to be generally perpendicular to a surface of the target, the target comprising a target material of complex oxide compounds; and
(b) irradiating a laser beam to the surface of the target to vaporize or sublime the target material forming over the target a flame-shaped plume having on axis generally perpendicular to the surface of the target so that the target material is deposited onto a surface of the substrate, the surface of the substrate maintaining the position to be generally perpendicular to the surface of the target and being generally parallel to the axis of the plume, wherein the target rotates on an axis perpendicular to the surface of the target and the substrate rotates on an axis perpendicular to the surface of the substrate (off-axis geometry), and wherein the laser beam scans the surface of the target. The chamber pressure P.sub.c for the off-axis geometry laser ablation should be 0.8 Torr.ltoreq.P.sub.C.ltoreq. 1.5 Torr for Y.sub.1 Ba.sub.2 Cu.sub.3 O.sub.7-x film.

REFERENCES:
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patent: 5206213 (1993-04-01), Cuomo et al.
patent: 5244873 (1993-09-01), Hattori et al.
patent: 5252547 (1993-10-01), Itozaki et al.
Patent Abstracts of Japan No. JP1177367, published Oct. 16, 1989.
Muenchausen et al, "Effects of beam parameters on excimer laser deposition of YBa.sub.2 Cu.sub.3 O.sub.7 -.sub..differential. " 320 Applied Physics Letters 56 (1990) Feb. 5, No. 6, New York, U.S.
Miura et al, "Structure and superconducting properties of Y.sub.1 Ba.sub.2 Cu.sub.3 O.sub.7 -.sub..differential. films prepared by transversely excited atmospheric pressure CO2 pulsed laser evaporation" Applied Physics Letters, 52 (1988) Mar. 21, No. 12, New York, U.S.
Holzapfel et al., "Off-axis laser deposition of YBa.sub.2 Cu.sub.3 O.sub.7 -.sub..delta. thin films" Applied Physics Letters, Dec. 28, 1992, vol. 61, No. 26, pp. 3178-3180.
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Japanese Patent Abstract Publication No. JP6219893.
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