Method and apparatus for depositing a homogeneous pyrolytic...

Details Method and apparatus for depositing a homogeneous pyrolytic... Method and apparatus for depositing a homogeneous pyrolytic...

2006-03-07

2006-03-07

Fiorilla, Chris (Department: 1734)

Coating apparatus

Projection or spray type

C118S612000, C118S302000

Reexamination Certificate

active

07008481

ABSTRACT:
A method and apparatus for depositing a homogeneous pyrolytic coating on substrates. These coatings would include insulator, metal and semiconductor films on a glass substrate. The apparatus controls the size and distribution of the spray droplets to improve the uniformity of the coatings.

REFERENCES:
patent: 5687905 (1997-11-01), Tsai
patent: 6607597 (2003-08-01), Sun et al.

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