Method and apparatus for degassing processing solution for subst

Details Method and apparatus for degassing processing solution for subst Method and apparatus for degassing processing solution for subst

1996-12-06

1998-08-04

Smith, Duane S.

Gas separation: processes

Selective diffusion of gases

Selective diffusion of gases through substantially solid...

95250, 96 6, 96201, B01D 1900, B01D 6100

Patent

active

057887420

ABSTRACT:
The present invention provides a degassing apparatus having a temperature regulating function. The degassing apparatus includes a number of gas permeating tubes for enabling a processing solution to flow through one of the two flow paths partitioned by gas permeating membranes that allow permeation of a gas but prevent permeation of a liquid, while enabling warm water to flow through the other flow path. A temperature regulator regulates the temperature of the warm water fed to the gas permeating tubes, and a gas suction pump sucks the gas from the warm water.

REFERENCES:
patent: 5053060 (1991-10-01), Kopf-Sill et al.
patent: 5123937 (1992-06-01), Shibata et al.

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