Method and apparatus for data stackification for run-to-run...

Details Method and apparatus for data stackification for run-to-run... Method and apparatus for data stackification for run-to-run...

2007-02-20

2007-02-20

Bahta, Kidest (Department: 2125)

Data processing: measuring, calibrating, or testing

Measurement system in a specific environment

Quality evaluation

C438S007000

Reexamination Certificate

active

10227753

ABSTRACT:
A method and an apparatus for organizing production data is provided. The method comprises performing at least one process run of semiconductor devices, and recording at least one manufacturing tag associated with the process run of semiconductor devices. The method further comprises performing metrology upon at least one process run of the semiconductor device for acquiring metrology data and for performing a metrology data stackification process upon the metrology data using the manufacturing tag for organizing and stacking the metrology data. The method further comprises modifying at least one control parameter is modified based upon the stacked metrology data.

REFERENCES:
patent: 6154711 (2000-11-01), Steffan et al.
patent: 6248602 (2001-06-01), Bode et al.
patent: 6256593 (2001-07-01), Damon et al.
patent: 6376261 (2002-04-01), Campbell
patent: 6460002 (2002-10-01), Bone et al.

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