Machine element or mechanism – Control lever and linkage systems – Multiple controlling elements for single controlled element
Reexamination Certificate
2005-12-20
2005-12-20
Hannon, Thomas R. (Department: 3682)
Machine element or mechanism
Control lever and linkage systems
Multiple controlling elements for single controlled element
C267S137000, C188S380000, C414S935000, C029S428000
Reexamination Certificate
active
06976400
ABSTRACT:
A method of damping a semiconductor wafer handling arm by attaching a spring and a mass coupled to the spring to form a mass spring system that is tuned to vibrate at a structural resonant frequency of the vibrating wafer handling arm. The spring has temperature insensitive spring characteristics and the mass and spring are constructed of materials that do not outgas or produce contaminants in a semiconductor processing environment. The mass spring system is preferably a cantilever beam spring connected to a high response point on the vibrating arm and oriented to vibrate in a plane perpendicular to the plane of the wafer. The mass is slidably adjustable along the length of the cantilever beam spring to adjust the resonant frequency. Vibration damping of the wafer handling arm is accomplished by the transfer of kinetic energy from the vibrating wafer handling arm to the mass spring system.
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DeLio & Peterson LLC
Hannon Thomas R.
Hansen Colby
Novellus Systems Inc.
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