Refrigeration – Low pressure cold trap process and apparatus
Patent
1994-04-08
1996-05-07
Capossela, Ronald C.
Refrigeration
Low pressure cold trap process and apparatus
415 90, 417901, B01D 800
Patent
active
055134998
ABSTRACT:
Methods and apparatus for partial regeneration of a cryopump are provided. The cyropump includes first and second stage cryoarrays, a refrigerator for cooling the first and second stage cryoarrays, and typically includes a sorbent material for removing gases by cryosorption. The second stage cryoarray is heated from its operating temperature to a partial regeneration temperature range selected to liberate captured gas from the second stage cryoarray and to retain condensed water vapor on the first stage cryoarray. The partial regeneration temperature range is preferably 100K to 160K and is more preferably 120K to 140K. When the second stage cryoarray has a temperature within the partial regeneration temperature range, gas liberated from the second stage cryoarray is pumped with a turbomolecular pump in fluid communication with the cryopump. The turbomolecular pump removes liberated gases from the cryopump at high speeds and produces a low pressure in the cryopump. As a result, the tendency for contamination of the sorbent material is low.
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Capossela Ronald C.
Cole Stanley Z.
Ebara Technologies Incorporated
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