Method and apparatus for coupling laser beams

Details Method and apparatus for coupling laser beams Method and apparatus for coupling laser beams

2006-02-09

2008-08-05

Spector, David N (Department: 2873)

Optical: systems and elements

Single channel simultaneously to or from plural channels

By partial reflection at beam splitting or combining surface

C359S618000, C359S639000

Reexamination Certificate

active

07408714

ABSTRACT:
In a photomask projection system, a photomask mask is illuminated by light from two lasers. A beam from one of the lasers is mixed with a beam from the other laser to provide two mixed beams each containing of portion of the beams from both lasers. The mixed beams are directed at an angle to each other and intersect on the photomask.

REFERENCES:
patent: 6134050 (2000-10-01), Conemac
patent: 6139166 (2000-10-01), Marshall et al.
patent: 6535531 (2003-03-01), Smith et al.
patent: 7167315 (2007-01-01), Watson et al.
patent: 2004/0136417 (2004-07-01), Webb et al.
patent: 2004/0182838 (2004-09-01), Das et al.
patent: 2005/0259709 (2005-11-01), Das et al.
patent: 2005/0286599 (2005-12-01), Rafac et al.
patent: 2006/0001878 (2006-01-01), Das et al.
patent: 2007/0279612 (2007-12-01), Maul
patent: 103 01 482 (2003-01-01), None

Affiliated with

Also associated with

Rating

Method and apparatus for coupling laser beams does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Method and apparatus for coupling laser beams, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method and apparatus for coupling laser beams will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-4008864