Method and apparatus for correcting rotational errors during ins

Details Method and apparatus for correcting rotational errors during ins Method and apparatus for correcting rotational errors during ins

1984-11-28

1988-04-12

Lall, Parshotam S.

Boots, shoes, and leggings

356394, 356401, 358101, 364491, G01B 1126, G01B 2100, G01B 2122

Patent

active

047379200

ABSTRACT:
A method and apparatus for inspecting masks and reticles by simplifying rotational alignment thereof so as to shorten alignment time is proposed wherein a rotational angle representing a rotational error between a reference substrate and a substrate to be inspected is measured in advance, the substrate to be inspected being provided with the same circuit patterns as those of the reference substrate in one-to-one correspondence, a position of a stage having these substrates thereon is automatically measured, and a measurement error caused by the rotational error can be automatically corrected, thereby providing accurate measured values.

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