Method and apparatus for correcting optical spot position

Details Method and apparatus for correcting optical spot position Method and apparatus for correcting optical spot position

1997-12-29

2000-05-30

Tran, Phuoc

Image analysis

Image sensing

Optical

382183, 382275, 382312, 235462, 358474, G06K 918, G06K 920, G06K 710, H04N 104

Patent

active

060699841

ABSTRACT:
A method and apparatus for producing a set of compensated commands for a spot position mechanism. A dimensioned grating is placed across the beam path and an image of the grating is generated. The image is analyzed and the pixel position of the grating edges is compiled. From this a list of grating edge distances is produced and used to generate observed edge positions. A line is fit and removed from the list to produce a list of observed errors. The observed errors are correlated to the proper position space and a set of positions errors is produced. The position errors are subtracted from the command positions to produce a set of correction positions. This set of corrected positions can be used to command the spot position mechanism. The positions might also be tabulated and referenced. Interpolation between the points can also be performed.

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