Method and apparatus for correcting high-order abberations in pa

Details Method and apparatus for correcting high-order abberations in pa Method and apparatus for correcting high-order abberations in pa

1987-02-17

1988-08-09

Church, Craig E.

Radiant energy

With charged particle beam deflection or focussing

Magnetic lens

313437, H01J 312

Patent

active

047630035

ABSTRACT:
A technique for correcting spherical and other aberrations in a particle beam. Spherical aberration is caused by variations in beam behavior dependent on the cube of the radius or radial position with respect to the beam axis. To correct for such aberration, the beam is passed through multiple compensation electric field arrays, each of which has multiple rows of parallel wires stretched transversely across the beam path, the rows being biased with separate voltages to provide an electric field that varies in proportion to the cube of the distance from the central row of the array. The multiple arrays provide a cylindrically symmetrical electric field, and are oriented at a uniform angular spacing, which, for spherical aberration, is 120 degrees.

REFERENCES:
patent: 3209147 (1965-09-01), Dupouy et al.
patent: 3912930 (1975-10-01), Creedon et al.
patent: 4486664 (1984-12-01), Wollnik

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