Method and apparatus for correcting drift during automated...

Details Method and apparatus for correcting drift during automated... Method and apparatus for correcting drift during automated...

2008-04-22

2008-04-22

Berman, Jack (Department: 2881)

Radiant energy

Means to align or position an object relative to a source or...

C250S492200, C250S492100, C250S492300, C250S492230, C250S306000, C250S307000, C250S309000, C430S030000, C430S005000, C356S237500, C382S144000

Reexamination Certificate

active

11287503

ABSTRACT:
A method and apparatus for correcting drift of the beam irradiation position during automated FIB (focused ion beam) processing with a reference image-setting unit, an image read-in unit for reading in images of the reference image region during the FIB processing, an arithmetic-and-control unit for finding the direction and amount of image deviation between the subsequent images, and a beam deflection system-adjusting unit for correcting the beam deflection system by correcting the image deviation based on the deviation in response to the output from the arithmetic-and-control unit. The arithmetic-and-control unit optimizes the brightness or contrast of the reference image.

REFERENCES:
patent: 6888149 (2005-05-01), Ikku
patent: 09-274879 (1997-10-01), None
patent: 2003-331775 (2003-11-01), None

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