Pumps – Processes
Reexamination Certificate
2007-03-06
2007-03-06
Freay, Charles G. (Department: 3746)
Pumps
Processes
C417S228000, C310S052000, C310S058000, C310S090000
Reexamination Certificate
active
10959483
ABSTRACT:
A system for cooling the bearings and motor in a pump assembly used for circulating supercritical fluid is disclosed. The system uses a pressurized coolant fluid that can be substantially pure CO2. The pressure difference between the circulating supercritical fluid and the coolant fluid is minimized to prevent cross-contamination of the fluids. In addition, the coolant fluid can provide a small amount of bearing lubrication.
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Freay Charles G.
Haverstock & Owens LLP
Tokyo Electron Limited
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