Heat exchange – Regenerator – Checker brick structure
Patent
1985-06-10
1986-02-04
Richter, Sheldon J.
Heat exchange
Regenerator
Checker brick structure
51235, 118 50, 118730, 118733, 165 86, 165185, 165 801, 2504923, 269 21, 269903, F28F 900
Patent
active
045679380
ABSTRACT:
Apparatus for providing thermal transfer between a semiconductor wafer and a heat sink or source in a vacuum processing chamber includes a platen against which the wafer is sealed to define a thermal transfer region therebetween. The platen includes a passage for gas flow between the chamber and the thermal transfer region. The apparatus further includes a valve for controllably opening and closing the passage and a controller for closing the valve when the pressure in the chamber reaches a predetermined value. Gas at the predetermined pressure, typically 0.5 to 100 Torr, is trapped in the thermal transfer region and conducts thermal energy between the workpiece and the platen. In a preferred embodiment, a plurality of platens are positioned on a rotating disc in an ion implantation system and a centrifugally operated valve is utilized to close the passage.
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Hammer, "Cooling Ion Implantation Target," IBM Technical Disclosure Bulletin, vol. 19, No. 6, Nov. 1976, pp. 2270-2271.
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Model 80-10 High Current Ion Implantation System Brochure, Varian/Extrion Division, Feb. 1982.
Cole Stanley Z.
McClellan William R.
Richter Sheldon J.
Varian Associates Inc.
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