Method and apparatus for controlling the processing of radiation

Coating apparatus – With means to apply electrical and/or radiant energy to work... – With electromagnetic and/or electrostatic removal of...

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Details

354320, 354324, 354328, 118689, G03D 306, G03D 308

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active

045779481

ABSTRACT:
Changes occurring in the electrical conductivity of liquids used to process image-wise exposed radiation-sensitive devices are used as a measure of the deterioration in effectiveness of the liquids. This deterioration is compensated for by varying the processing conditions, such as temperature, time, scrubbing action and processing liquid composition, in accordance with the change in conductivity.

REFERENCES:
patent: 3515000 (1970-06-01), Baumoel
patent: 3846818 (1974-11-01), Merz
patent: 3855861 (1974-12-01), Zimmermann et al.
patent: 4240737 (1980-12-01), Lawson
patent: 4257347 (1981-03-01), Stahl
patent: 4284343 (1981-08-01), Junghanns
patent: 4295913 (1981-10-01), Purr et al.
patent: 4310238 (1982-01-01), Mochizuki et al.

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