Method and apparatus for controlling the position of a probe...

Details Method and apparatus for controlling the position of a probe... Method and apparatus for controlling the position of a probe...

2006-10-31

2006-10-31

Lee, Hwa (Andrew) (Department: 2877)

Optics: measuring and testing

By light interference

For dimensional measurement

C356S493000

Reexamination Certificate

active

07130057

ABSTRACT:
A method for controlling the position of a probe location relative to a fixed reference point of a probe processing apparatus is described. Initially, an optical laser apparatus is coupled to the probe processing apparatus. The position of the probe location is set to fall within a predetermined converging range of a positioning laser beam coming from the optical laser apparatus. The positioning laser beam is then split into a probe beam and a reference beam. The probe beam and the reference beam are polarized in different directions with respect to each other. The reference beam is subsequently combined with a reflected beam formed by the probe beam reflected from the probe location. The phase difference between the reference beam and the reflected beam is detected, and a table on the probe processing apparatus for supporting the probe is adjusted to minimize the detected phase difference.

REFERENCES:
patent: 3601490 (1971-08-01), Erickson
patent: 09113217 (1997-05-01), None
patent: 410090591 (1998-04-01), None

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