Method and apparatus for controlling the output of a gas...

Details Method and apparatus for controlling the output of a gas... Method and apparatus for controlling the output of a gas...

2007-10-02

2007-10-02

Harvey, Minsun Oh (Department: 2828)

Coherent light generators

Particular active media

Gas

C372S055000, C372S008000

Reexamination Certificate

active

11035938

ABSTRACT:
The present invention relates to a fluorine gas discharge laser system and control of replenishment of fluorine gas as the gas discharge laser operates and consumes fluorine.

REFERENCES:
patent: 4223279 (1980-09-01), Bradford, Jr. et al.
patent: 4455658 (1984-06-01), Sutter et al.
patent: 4959840 (1990-09-01), Akins et al.
patent: 5023884 (1991-06-01), Akins et al.
patent: 5025445 (1991-06-01), Anderson et al.
patent: 5025446 (1991-06-01), Kuizenga
patent: 5142543 (1992-08-01), Wakabayashi et al.
patent: 5189678 (1993-02-01), Ball et al.
patent: 5313481 (1994-05-01), Cook et al.
patent: 5315611 (1994-05-01), Ball et al.
patent: 5359620 (1994-10-01), Akins
patent: 5448580 (1995-09-01), Birx et al.
patent: 5450436 (1995-09-01), Mizoguchi et al.
patent: 5471965 (1995-12-01), Kapich
patent: 5642374 (1997-06-01), Wakabayashi et al.
patent: 5754579 (1998-05-01), Mizoguchi et al.
patent: 5852621 (1998-12-01), Sandstrom
patent: 5863017 (1999-01-01), Larson et al.
patent: 5887014 (1999-03-01), Das
patent: 5953360 (1999-09-01), Vitruk et al.
patent: 5978394 (1999-11-01), Newman et al.
patent: 5978406 (1999-11-01), Rokni et al.
patent: 5991324 (1999-11-01), Knowles et al.
patent: 6005879 (1999-12-01), Sandstrom et al.
patent: 6016325 (2000-01-01), Ness et al.
patent: 6018537 (2000-01-01), Hofmann et al.
patent: 6028880 (2000-02-01), Carlesi et al.
patent: 6067311 (2000-05-01), Morton et al.
patent: 6094448 (2000-07-01), Fomenkov et al.
patent: 6104735 (2000-08-01), Webb
patent: 6128323 (2000-10-01), Myers et al.
patent: 6130904 (2000-10-01), Ishihara et al.
patent: 6151349 (2000-11-01), Gong et al.
patent: 6160832 (2000-12-01), Kleinschmidt et al.
patent: 6164116 (2000-12-01), Rice et al.
patent: 6192064 (2001-02-01), Algots et al.
patent: 6208674 (2001-03-01), Webb et al.
patent: 6208675 (2001-03-01), Webb
patent: 6212211 (2001-04-01), Azzola et al.
patent: 6212214 (2001-04-01), Volger et al.
patent: 6219368 (2001-04-01), Govorkov
patent: 6240117 (2001-05-01), Gong et al.
patent: 6243406 (2001-06-01), Heist et al.
patent: 6317447 (2001-11-01), Partlo et al.
patent: 6320892 (2001-11-01), Padmabandu et al.
patent: 6330261 (2001-12-01), Ishihara et al.
patent: 6330267 (2001-12-01), Volger et al.
patent: 6389052 (2002-05-01), Albrecht et al.
patent: 6414979 (2002-07-01), Ujazdowski et al.
patent: 6477193 (2002-11-01), Oliver et al.
patent: 6490307 (2002-12-01), De Mos et al.
patent: 6490308 (2002-12-01), Albrecht et al.
patent: 6493370 (2002-12-01), Albrecht et al.
patent: 6504861 (2003-01-01), Albrecht et al.
patent: 6526085 (2003-02-01), Vogler et al.
patent: 6529533 (2003-03-01), Voss
patent: 6556600 (2003-04-01), Sandstrom et al.
patent: 6563853 (2003-05-01), Heist et al.
patent: 6690704 (2004-02-01), Fallon et al.
patent: 6965624 (2005-11-01), Albrecht et al.
patent: 2002/0031157 (2002-03-01), Heist et al.
patent: 2005/0135451 (2005-06-01), Rule et al.
patent: 2601410 (1997-01-01), None
patent: 09-097951 (1997-04-01), None
patent: 2701184 (1997-10-01), None
patent: 10-074993 (1998-03-01), None
patent: 2000-022255 (2000-01-01), None
patent: 2001-332793 (2001-11-01), None
patent: 2002-208746 (2002-07-01), None
patent: 3297108 (2002-07-01), None
patent: 2002-294856 (2002-10-01), None

Affiliated with

Also associated with

Rating

Method and apparatus for controlling the output of a gas... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Method and apparatus for controlling the output of a gas..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method and apparatus for controlling the output of a gas... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3903387