Coherent light generators – Particular active media – Gas
Reexamination Certificate
2007-04-24
2007-04-24
Harvey, Minsun Gh (Department: 2828)
Coherent light generators
Particular active media
Gas
C372S057000
Reexamination Certificate
active
10740659
ABSTRACT:
A method and apparatus are disclosed for controlling the output of a two chamber gas discharge laser comprising an oscillator gas discharge laser and an amplifier gas discharge laser that may comprise establishing a multidimensional variable state space comprising a coordinate system having at least two coordinates, each coordinate comprising a selected variable representing an operating parameter of the oscillator or the amplifier; tracking a multidimensional operating point in the multidimensional variable state space according to the variation of the selected variables in either or both of the oscillator or the amplifier to determine the position of the multidimensional operating point in the multidimensional state space; determining from the position of the multidimensional operating point in the multidimensional operating space a region from a plurality of defined regions in the multidimensional operating space in which the multidimensional operating point is located and identifying the region.
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Rule John A.
Zambon Paolo
Cray William C.
Cymer Inc.
Harvey Minsun Gh
Nguyen Phillip
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