Method and apparatus for controlling the organic contamination l

Details Method and apparatus for controlling the organic contamination l Method and apparatus for controlling the organic contamination l

1986-07-11

1987-11-17

Smith, John D.

Coating processes

Measuring, testing, or indicating

118689, 118690, 118423, 204 1T, 204434, 4274431, C23C 1840

Patent

active

047073780

ABSTRACT:
An electroless plating bath is selectively cleaned of organic contaminants. The organic contaminants are detected by measuring the capacitance between a working electrode and counter electrode with a potentiostat. The capacitance measurements are used to indicate the level of organic contaminants. Exposure of the dummy plating surface in the electroless plating bath is controlled such that the exposed surface is directly proportional to the detected level of organic contaminants.

REFERENCES:
patent: 4152164 (1979-05-01), Gulla
patent: 4326940 (1982-04-01), Eckles
patent: 4331699 (1982-05-01), Suzuki
patent: 4353933 (1982-10-01), Araki
patent: 4626446 (1986-12-01), Capwell
patent: 4631116 (1986-12-01), Ludwig

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