Gas separation: processes – With control responsive to sensed condition – Pressure sensed
Reexamination Certificate
2005-08-09
2005-08-09
Lawrence, Frank M. (Department: 1724)
Gas separation: processes
With control responsive to sensed condition
Pressure sensed
C095S023000, C096S252000, C096S253000, C110S203000
Reexamination Certificate
active
06926756
ABSTRACT:
A method and system to control the operation of a scrubber, in which, the system includes a valve to control the flow of an exhaust from a tool, a sensor to determine whether the valve is open or closed and a controller to control the operation of the scrubber depending on whether the valve is open or closed.
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patent: 62-23423 (1987-01-01), None
Di Hour Chin
Yuan Cheng Mu
Lawrence Frank M.
Macronix International Co. Ltd.
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