Method and apparatus for controlling the acceleration energy of

Details Method and apparatus for controlling the acceleration energy of Method and apparatus for controlling the acceleration energy of

1995-09-22

1998-08-18

Patel, Nimeshkumar D.

Electric lamp and discharge devices: systems

High energy particle accelerator tube

315506, 315507, H05H 712

Patent

active

057962197

ABSTRACT:
A method for controlling a particle acceleration energy in a radio-frequency quadrupole accelerator, the method being particularly adapted for ion implantation in the process of manufacturing semiconductor devices, wherein the particle acceleration energy is varied without the necessity of changing the resonant frequency of the RFQ accelerator so that the final energy of the particles has a plurality of distinct energy having a lower value than the designed voltage.

REFERENCES:
K. Tokiguchi, et al; Nuclear Instruments and Method in Physics Research B 37/38 (1989) 253-255.

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