Method and apparatus for controlling substrate processing appara

Details Method and apparatus for controlling substrate processing appara Method and apparatus for controlling substrate processing appara

1996-10-11

1999-04-27

Elmore, Reba I.

Boots, shoes, and leggings

36446815, 36446817, 364183, 36447411, G06F 1900, G06G 764, G06G 766

Patent

active

058985883

ABSTRACT:
A method and apparatus for successively conveying substrates between a plurality of processing units, the processing units processing the substrates as required where, when one of the plurality of processing units raises an alarm to inform the user of the occurrence of some abnormality, the processing and conveyance of the substrates located on the transport path in and after either an alarm-raising processing unit or a predetermined skip-mode subject unit are completed; however the conveyance is suspended for the substrates located on the transport path before either the alarm-raising processing unit or the predetermined skip-mode subject unit.

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