Method and apparatus for controlling shape of single crystal

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156601, 156617SP, 364162, 364477, 422249, B01D 900, G06G 766, G06G 758

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active

045919941

ABSTRACT:
A method for controlling the shape of a single crystal. The weight of a single crystal pulled by the Czochralski method is detected, to obtain a weight signal W. The weight signal W is differentiated over time, to obtain a differential signal dW/dt. Using the differential signal dW/dt, (A.multidot.dW/dt+B).theta. is computed, to obtain an operation signal f. A and B are parameters which are determined by predetermined manufacturing conditions of the Czochralski method, and .theta. is a preset growing angle of the single crystal. The operation signal f is integrated over time, to obtain an integral signal F. The integral signal F and the differential signal dW/dt are compared to obtain a deviation signal. The heating power supplied to the crucible is controlled by use of the deviation signal, to keep the growing angle of the single crystal constant.

REFERENCES:
patent: 3934983 (1976-01-01), Bardsley et al.
patent: 4008387 (1977-02-01), Green et al.
patent: 4032389 (1977-06-01), Joyce
patent: 4073355 (1978-02-01), Schmidt et al.
patent: 4234376 (1980-11-01), Linares
patent: 4239583 (1980-12-01), Hatch et al.
patent: 4258003 (1981-03-01), Hurle et al.
patent: 4397813 (1983-08-01), Washizuka et al.
Japanese Utility Model Publication (Kokoku) No. 54-4345 K. Takaji et al., Mar. 6, 1979.
J. Crystal Growth 19 (1973), 187-192, A. E. Zinnes et al.
J. Crystal Growth 40 (1977) 21-28, W. Bardsley.

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