Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing
Patent
1998-05-06
2000-10-17
Lee, Thomas C.
Data processing: generic control systems or specific application
Specific application, apparatus or process
Product assembly or manufacturing
710 58, 710244, 709103, 700100, 700101, 414 14, G06F 1900
Patent
active
061344826
ABSTRACT:
Semiconductor wafer fabrication equipment comprising a selecting device for selecting semiconductor wafers destined to a processor on the basis of a remaining process time applicable to that processor in the equipment, a transporting device for transporting the selected semiconductor wafers to the processor, another selecting device for selecting a processor or a storage device constituting a transport destination to which to transport processed semiconductor wafers, and another transporting device for transporting the semiconductor wafers to the destination processor or storage device in accordance with a transport control changeover code read from the processors and storage devices of the equipment.
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patent: 5179709 (1993-01-01), Bailey et al.
patent: 5546426 (1996-08-01), Tomiyori
patent: 5615376 (1997-03-01), Ranganathan
patent: 5818716 (1998-10-01), Chin et al.
Du Thuan
Lee Thomas C.
Mitsubishi Denki & Kabushiki Kaisha
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